ChamberKleen™ Diffusers - NW40/NW50

Home
Process Gas Filtration
ChamberKleen™ Diffusers - NW40/NW50

BROCHURE

COST

ChamberKleen diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time.

Features

Reduced turbulent flow during venting of process chambers
High differential pressure capability
316L stainless steel housing
Filters wide variety of gases
Cleanroom manufactured and packaged

Specifications

Materials	316 L SS filter and housing ≤ 0.51 μm / 20 μin R_a wetted surface finish Fluorocarbon o-ring
Particle Removal Rating	≥ 3 nm Particle contribution above background: particle / (m³ or ft³) ≥ 0.01 μm at 75 slpm
Connections	¹/₄" Gasket seal inlet (VCR1 or compatible) I40: NW40 ISO vacuum flange* I50: NW50 ISO vacuum flange* *Compatible with standard ISO bulkhead clamps
Maximum Vent-Up Cycles	100,000 cycles at maximum differential pressure: 0.7 MPa @ 20°C / 105 psid @ 68°F
Operating Conditions	Maximum allowable differential pressure 0.7 MPa @ 20°C / 105 psid @ 68°F Maximum operating temperature: 100°C / 212°F (o-ring limited)
Design Flow Rate	75 slpm

Performance

Pressure Drop vs. Gas Flow Rate

Pressure vs. Chamber Fill Time

Additional Information

Dimensions

Ordering Information

Part Number	Description	Nominal Diameter (D) (mm / in.)	Nominal Length (L) (mm / in.)
CK4000I40H	NW40 ISO vacuum flange	55 / 2.16	49 / 1.93
CK4000I50H	NW50 ISO vacuum flange	75 / 2.95	49 / 1.93

Get In Touch

Please fill out the form below with your details and message, and we'll get back to you as soon as possible.

Name*

Phone

Email*

Company*

Your Question*

I would like to receive more information about ABLROOTS INDUSTRIES products and services, and related product and services from ABLROOTS INDUSTRIES related companies via email or phone.

More Products

ChamberKleen™ Diffusers

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

Emflon® PF Filter (Gas Filtration)

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

Gasket-Sert™ PSP Filter

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote