ChamberKleen™ Diffusers

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Process Gas Filtration
ChamberKleen™ Diffusers

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Gas diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time.

The Pall ChamberKleen™ 1100 and 5500 Series diffusers combine a stainless steel filter and a unique diffuser membrane that allows flow in 360 degrees. This combination allows large volumes of gas to flow in a uniform manner, limiting the disturbance of particles in the chamber. Consequently, fast vent times can be achieved with little particle disturbance.

Reduces turbulent gas flow during venting of process chambers
360° diffuser design optimizes gas flow
316L stainless steel filter medium
316L stainless steel diffuser
Cleanroom manufactured and packaged

Specifications

Materials

316L stainless steel filter medium
316L stainless steel diffuser
Viton¹ O-ring
≤ 22 μin / 0.56 μm R_a internal surface finish

Removal Rating

≥ 0.003 μm
No particle contribution above background; ≤ 1 particle /(ft³ or m³)

Connections

1100 Series: NW25 ISO Vacuum Flange
5500 Series: NW63 ISO Vacuum Flange

Operating Conditions

Design Flow Rate²
- 1100 Series: 15 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- 5500 Series: 150 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
Maximum Operating Temperature
- 1100, 5500 Series: 300°F / 149°C (limited by O-ring flange connection)

Recommended Applications

Vacuum chamber
Load lock chamber

1 Viton is a registered trademark of DuPont Dow Elastomers
2 Additional designs are available. Please contact Pall Microelectronics for more information.

Performance

Pressure vs. Average Flow Rate

Pressure vs. Chamber Fill Time

Dimensions

Ordering Information

Part Number	Description	Design Flow Rate³ (slpm)
CK1100I25H	1100 Series, 316L stainless steel filter, Viton¹ O-ring	0-15
CK5500I63H	5500 Series, 316L stainless steel filter, Viton O-ring	0-150

3 Reference Design Flow Rate on page 182 of catalog.

Unit conversion: 1 bar = 100 kilopascals

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