Emflon® Filter

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Process Gas Filtration
Emflon® Filter

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Emflon filter elements are designed for 1.5 nm filtration of bulk gas applications found in the semiconductor industry.

Features

Wide variety of applications
High particle retention
High flow rates vs. differential pressure
Optimized cartridge design
Manufactured in a cleanroom environment
100% integrity tested

Specifications

Components	Materials
Filter Medium	PTFE
Media Support	Polypropylene
Inner Core	Polypropylene
Outer Cage	Polypropylene
End Caps	Polypropylene
O-ring Options	Acid proof fluoroelastomer, FEP Encapsulated fluoroelastiomer
Removal Ratings	1.5 nm
Filter Areas	AB1	MCY1001	MDY1002
	10" / 254 mm : 9.45 ft² / 0.88 m²	10" / 254 mm : 9.26 ft² / 0.86 m²	20" / 508 mm : 18.52 ft² / 1.72 m²
Nominal Length	10" / 254 mm 20“ / 508 mm 30" / 762 mm 40“ / 1,016 mm		20“ / 508 mm 30" / 762 mm
Diameter	2.75" / 70 mm
O-ring Size / End Caps	Code 3 (222 double O-ring / flat end) Code 8 (222 double O-ring / finned end) Code 7 (226 double O-ring bayonet lock / finned end)
Maximum Operating Temperature	194 °F / 90 °C
Maximum forward differential pressure	80 psid @ 120 °F / 5.5 bar @ 50 °C 50 psid @ 194 °F / 3.5 bar @ 90 °C

Performance

Pressure Drop vs. Gas Flow Rate

Ordering Information

Part Numbers / Ordering Information

O-Ring Seal

AB [1] [2] [3] E [4]

Table 1
Code	Nominal length (mm / in)
1	254 / 10
2	508 / 20
3	762 / 30
4	1,016 / 40
Table 2
Code	Removal Ratings
FR	1.5 nm
Table 3
Code	O-ring Specifications
7	AS568A-226
8	AS568A-222
3	AS568A-222
Table 4
Code	O-ring Materials¹
H1	FEP Encapsulated Fluoroelastomer
HF	Acid-proof Fluoroelastomer

¹Other O-ring material options available.

Gasket seal
MCY1001 [7] E [8]
MDY100 [9] [7] E [8]

Table 7
Code	Removal Ratings
FR	1.5 nm
Table 8
Code	Gasket Materials
H13	NBR
H2	PTFE
H	Fluoroelastomer
J	EPDM
Table 9
Code	Nominal length (mm / in)
2	508 / 20
3	762 / 30

Representative example part numbers

O-Ring Seal

AB1FR3EHF	AB2FR8EHF	AB3FR7EHF	AB4FR7EHF
AB1FR3EH1	AB2FR7EHF	AB3FR8EHF	AB4FR3EHF
AB1FR7EH1	AB2FR3EHF	AB3FR3EHF
AB1FR3EHF	AB2FR3EH1	AB3FR3EH1
	AB2FR7EH1

Gasket seal

MCY1001FREH2	MDY1002FREH13	MDY1003FREH13
MCY1001FREJ	MDY1002FREH2

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