Gasket-Sert™ PMF Filter

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Process Gas Filtration
Gasket-Sert™ PMF Filter

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The Gasket-SertTM PMF filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

True in-line design and easy installation
Fits in place of standard 1/4” and 3/8”,1/2” VCR¹ ,UJR² gasket & 1/4” and 3/8” UPG³ gasket
Broad compatibility with process gases
Low differential pressure
Gasket material 316L stainless steel
Dried with high purity nitrogen
Cleanroom packaged
No hold-up volume
No particle contribution above background

No housing required
Retrofit of existing panels without reconfiguring of systems
Zero displacement
Protection for regulators and MFCs

1 VCR is a trademark of Swagelok Co.
2 UJR is a trademark of Fujikin Incorporated.
3 UPG is a trademark of Fujikin Incorporated.

Specifications

Materials

Medium: 316L stainless steel
Gasket: 316L stainless steel

Removal Rating

≥ 0.4 μm

Maximum Operating Temperature Non-Corrosive Gases

840 °F / 450 °C

Maximum Differential Pressure

60 psid @ 100 °F / 4.2 bar @ 38 °C

Performance

Pressure Drop vs. Gas Flow Rate

Ordering Information / Part Numbers

Maximum Differential Pressure2	Operating Temperature
4 bard (60 psid)	30 °C (86 °F)
3.4 bard (50 psid)	50 °C (122 °F)
2 bard (30 psid)	70 °C (158 °F)
1 bard (15 psid)	82 °C (180 °F)
0.3 bard (5 psid)3	125 °C (257 °F)

1 Fluids which do not swell, soften or adversely affect any of the filter components
2 In forward direction. Recommended change-out differential pressure is 2.4 bard (35 psid), provided the maximum differential pressure (based on temperature) is not exceeded.
3 AB style only

Ordering Information

CNF1004 [TABLE 1]


Code	Fitting type	Gasket material	Medium material	Length (L) (mm)	Length (A) (mm)
USG4	1⁄4" UJR, VCR	316L stainless steel	316L stainless steel	26.1	∅4.2
USG6	3⁄8" 1⁄2" UJR, VCR	316L stainless steel	316L stainless steel	30.0	∅6.7
UPSG4	1⁄4" UPG	316L stainless steel	316L stainless steel	26.6	∅4.2
UPSG6	3⁄8" UPG	316L stainless steel	316L stainless steel	30.0	∅6.7

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