Gasket-Sert™ Filter

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Process Gas Filtration
Gasket-Sert™ Filter

BROCHURE

COST

The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

True in-line design and easy installation
Fits in place of standard .25 in. VCR Gasket
Available in 316L or Hastelloy C-22
Gasket material Nickel 200
Broad compatibility with process gases
Low differential pressure

All metal construction
Dried with high purity nitrogen
Cleanroom packaged
No particle contribution above background
No housing required
Retrofit of existing panels without reconfiguring of systems
Zero displacement
Protection for regulators and MFCs

Specifications

Materials	Medium	316L Stainless Steel or Hastelloy C-22
	Gasket	Nickel 200
Removal Rating		≥ 0.4 μm
Recommended Flow Range		0-10 SCFM / 0-280 slpm
Maximum Operating Temperature		Non-Corrosive Gases	840 °F / 450 °C
		Corrosive Gases	70 °F / 21 °C
Maximum Differential Pressure		316L Stainless Steel	400 psid @ 840 °F / 27 bar @ 450 °C 750 psid @ 100 °F / 52 bar @ 38 °C
		Hastelloy C-22	500 psid @ 100 °F / 34 bar @ 38 °C

Performance

Pressure Drop vs. Gas Flow Rate

Additional Information

Dimensions

Ordering Information

Part Number	Material of Construction	Fitting Type
CNL3004VNG4	316L Stainless Steel Media, Nickel 200 Gasket	¹⁄₄ in. VCR
CNC3004VNG4R	Hastelloy C-22 Media, Nickel 200 Gasket	¹⁄₄ in. VCR

Unit conversion: 1 bar = 100 kilopascals

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