The Gaskleen® IV Series Filter Assembly is specifically designed for 1.5 nanometers (0.0015 µm) filtration of ultra-high purity semiconductor process gases. This assembly provides additional features over those normally associated with all fluoro-polymer element point-ofuse process gas filters. These include:
1 VCR is a trademark of Swagelok Co.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.
1 VCR is a trademark of Swagelok Co. 2 Particle rating based on laboratory testing with NaCl aerosol. 3 Mylar is a registered trademark of Dupont Teijin Films.
1 For .25 in. connections
Unit conversion: 1 bar = 100 kilopascals
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Product Type: Filter Capsules
Segment: Photovoltaics, Semiconductor