Gaskleen Light filter assemblies have been designed specifically to provide the high-purity gas filtration required in solar cell and liquid crystal display manufacturing. The assemblies are available in two styles: the TFA3 has a high-flow, compact design, for use where space is limited; the TFA6 is designed for applications where higher flow capacity is desired.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.
1 Particle rating is based on laboratory testing with NaCl aerosol. 2 VCR is a registered trademark of Swagelok Company.
Unit conversion: 100 kilopascals = 1 bar
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Product Type: Filter Capsules
Segment: Photovoltaics, Semiconductor