Gaskleen® TM Filter Assemblies 1 1/2'' C-Seal

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Process Gas Filtration
Gaskleen® TM Filter Assemblies 1 1/2'' C-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

316L stainless steel housing
State-of-the-art nickel filter medium
High temperature and pressure capabilities
Excellent gas displacement and desorption characteristics
100% helium leak tested
Manufactured and packaged in a cleanroom environment
No downstream welds
Minimum downstream volume

Products in this datasheet may be covered by one or more patents, including US 1,105,201.

Specifications

Materials

316L stainless steel housing
State-of-the-art nickel filter
Housing meets or exceeds typical VIM / VAR specifications
Cr:Fe (1:1) chromium-enriched internal surface chemistry
≤ 10 μin / 0.25 μm R_a internal surface finish

Removal Rating

≥ 3 nm

Particle Removal Characteristics

10⁹ particle reduction at rated flow of 100 slpm

Connections

C-Seal, 1¹⁄₂ in. interface

Leak Rating

100% helium leak tested to 10^-9 atm•cm³/s
Design validated to 10^-11 atm•cm³/s

Operating Conditions

Maximum operating pressure: 5.2 MPa @ 100 °C / 750 psig @ 212 °F
Maximum allowable differential pressure: 0.69 MPa @ 38 °C / 100 psid @ 100 °F

Performance

Pressure Drop vs. Gas Flow Rate*

Additional Information

Dimensions

Ordering Information

Part Number	Description	Height (H) (mm / in.)	Width (W) (mm / in.)	Design Flow Rate (slpm)
GTMN4600CC4	316L stainless steel housing Nickel filter	75.9 / 2.99	33.8 / 1.33	0 – 100

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