Gaskleen® TM Filter Assemblies 1 1/8'' C-Seal

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Process Gas Filtration
Gaskleen® TM Filter Assemblies 1 1/8'' C-Seal

Pall's Gaskleen® Top Mount (TM) filter assemblies are designed for 1.5 nanometer filtration of semiconductor process gases. The top mount filter is ideally suited for integrated gas delivery systems, providing easy access and changeout.

316L stainless steel housing
State-of-the-art filter medium
High temperature and pressure capabilities.
Excellent gas displacement and desorption characteristics
100 % helium leak tested
Manufactured and packaged in a cleanroom environment

Specifications

Materials of Construction

Filter Medium	GTMF1013CC4 : 316L stainless steel GTMF3700CC4 : 316L stainless steel GTMN1013CC4 : Nickel GTMP3101CC4 : PTFE
Internal Surface Finish	≤ 0.13 μm / 5 μin Ra
Housing	316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
Internal housing surface chmistry	Cr:Fe (1:1) chromium-enriched
Core and end caps (GTMP3101CC4)	PFA
O-ring (GTMP3101CC4)	FEP encapsulated fluorocarbon
Removal Rating	1.5 nm
Particle Removal Characteristics	GTMF1013CC4 : 10⁹ particle reduction up to 5 slpm GTMN1013CC4 : 10⁹ particle reduction up to 3 slpm GTMP3101CC4 : 10⁹ particle reduction up to 75 slpm GTMF3700CC4 : 10⁹ particle reduction up to 100 slpm
Connections	C-seal, 1 1/8" interface
Leak Rating	100% helium leak tested to 10^-9 atm cm³ / sec Design validated to 10-11 atm cm³ / sec
Design Pressure (Maximum Operating Pressure)	3.5 MPa @ 100 ºC / 500 psig @ 212 ºF
Maximum Allowable Differential Pressure	GTMF1013CC4 / GTMN1013CC4 / GTMF3700CC4 0.7 MPa @ 38 ºC / 100 psid @ 100 ºF GTMP3101CC4 0.6 MPa @ 121 ºC / 80 psid @ 250 ºF

Performance

Air Flow vs. Pressure Drop

GTMF1013CC4

GTMN1013CC4

GTMP3101CC4

GTMF3700CC4

Additional Information

Dimensions

Ordering Information

Part Number	Description	Height (mm / in.)	Shell Diameter (mm / in.)	Design Flow Rate (slpm)
GTMF1013CC4	All 316 L stainless steel	35.6 / 1.4	22.1 / 0.87	0 – 5
GTMN1013CC4	316 L stainless steel housing Nickel filter	35.6 / 1.4	22.1 / 0.87	0 – 3
GTMP3101CC4	316 L stainless steel housing All fluoro-polymer element	74.5 / 2.93	21.7 / 0.85	0 – 75
GTMF3700CC4	All 316 L stainless steel	74.5 / 2.93	21.7 / 0.85	0 - 100

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