Gaskleen® TM Filter Assemblies 1 1/8'' W-Seal

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Process Gas Filtration
Gaskleen® TM Filter Assemblies 1 1/8'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for 1.5 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

Electropolished 316L stainless steel housing
State-of-the-art 316L stainless steel or nickel filter medium
High temperature and pressure capabilities
Excellent gas displacement and desorption characteristics
100% helium leak tested
Manufactured and packaged in a cleanroom environment

Specifications

Materials of Construction

Filter Medium	GTMF1013F4A: 316L stainless steel GTMN1013F4A: Nickel GTMF3700F4A: 316L stainless steel
Internal Surface Finish	≤ 5 μin / 0.13 μm R_a
Housing	Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications.
Internal housing surface chemistry	Cr:Fe (1:1) chromium-enriched
Removal Rating	1.5 nm
Particle Removal Characteristics	GTMF1013F4A: 10⁹ particle reduction up to 5 slpm GTMN1013F4A: 10⁹ particle reduction up to 3 slpm GTMF3700F4A: 10⁹ particle reduction up to 100 slpm
Connections	W-seal, 1 1/8" interface
Leak Rating	100% helium leak tested to 10^-9 atm cm³ / sec Design validated to 10^-11 atm cm³ / sec
Maximum Operating Pressure	3.4 MPa @ 100 ºC / 500 psig @ 212 ºF
Maximum Allowable Differential Pressure	0.69 MPa @ 40 ºC / 100 psid @ 104 ºF
EU pressure equipment directive	Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.

Performance

Pressure Drop vs. Gas Flow Rate

F1013

F3700

Additional Information

Dimensions

F1013

Ordering Information

Part Number	Description	Height (mm / in.)	Design Flow Rate (slpm)
GTMF1013F4A	All 316L stainless steel	36.8 / 1.45	0 - 5
GTMN1013F4A	316L stainless steel housing Nickel filter	40.2 / 1.45	0 - 3
GTMF3700F4A	316L stainless steel	79.3 / 3.12	0 - 100

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