Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal

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Process Gas Filtration
Gaskleen® TM Filter Assemblies 1 1/2'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for 1.5 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.

Electropolished 316L stainless steel housing
State-of-the-art 316L stainless steel filter medium
High temperature and pressure capabilities
Excellent gas displacement and desorption characteristics
100% helium leak tested
Manufactured and packaged in a cleanroom environment
Available with a ¹⁄₄ in. VCR¹ port on top of assembly for a pressure gauge or other component
Improved corrosion resistance using Pall's proprietary process

¹ VCR is a registered trademark of Swagelok Company

Specifications

Filter Medium	316L stainless steel
Internal Surface Finish	≤ 0.7 μm R_max
Housing	Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications
Removal Rating	1.5 nm
Particle Removal Characteristics	10⁹ reduction at rated flow of 5 slpm
	10⁶ reduction at rated flow of 15 slpm
	10⁴ reduction at rated flow of 30 slpm
Connections	W-seal, 11⁄2˝ interface
Leak Rating	100% helium leak tested to 10^-9 atm•cm³/s
Leak Rating	Design validated to 10^-11 atm•cm³/s
Maximum Operating Pressure	0.97 MPa @ 40 °C / 140 psig @ 104 °F
Maximum Allowable Differential Pressure	0.69 MPa @ 40 °C / 100 psid @ 104 °F
EU pressure equipment directive	Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

¹ VCR is a registered trademark of Swagelok Company

Performance

Pressure Drop vs. Gas Flow Rate

F3200

Additional Information

Dimensions

GTM-3200F4A

GTMF3200F4A-VM4

Ordering Information

Part Number	Description¹	Height (H) (mm / in.)	Design Flow Rate (slpm)
GTMF3200F4A	All 316L stainless steel	42 / 1.65	0-30
GTMF3200F4A-VM4	All 316L stainless steel ¹⁄₄ in. VCR port	60 / 2.36	0-30

¹ Please contact Pall Microelectronics for other configurations.

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