Gaskleen® V Series Filter Assembly

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Process Gas Filtration
Gaskleen® V Series Filter Assembly

The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.

316L stainless steel housing
All-fluoro-polymer filter element
High temperature and pressure resistance
100% helium leak tested
Manufactured and packaged in a cleanroom environment.

Products in this datasheet may be covered by one or more patents, including US 5,510,026.

Specifications

Materials of Construction

Filter Medium	PTFE
Support	Fluoropolymer
Core and End caps	PFA
Internal Surface Finish	≤ 0.18 μm / 7 μin R^a ≤ 0.51 μm / 20 μin R^a
Housing	Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
Internal Housing Surface Chemistry	Cr:Fe (≥1.2:1) chromium-enriched
Removal Rating¹	1.5 nm
Preconditioned Cleanliness Option	< 10 ppb moisture contribution < 10 ppb total hydrocarbon (THC) contribution < 10 ppb oxygen (O₂) contribution
Connections	1⁄4 in, 1⁄2 in or 3/4 in Gasket Seal (VCR² or compatible) 1⁄4 in 3/8 in or 1⁄2 compression fitting
Leak Rating	100% helium leak tested to 10^-9 atm cm³/sec Design validated to 10^-11 atm cm³/sec
Design Pressure (Maximum Operating Pressure)	5.2 MPa @ 140 ºC / 750 psig @ 284 ºF
Maximum Allowable Differential Pressure	0.7 MPa @ 20 ºC / 100 psid @ 68 ºF
Maximum Allowable Reverse Differential Pressure	0.34 MPa @ 20 ºC / 50 psid @ 68 ºF

¹ Particle rating based on laboratory testing with NaCl aerosol.
² VCR is a trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Additional Information

Dimensions

Unit conversion: 100 kilopascals = 1 bar

Ordering Information

Part Number³	Description	Nominal Length (L) (mm / inch)	Preconditioned
SGLFPF6501VMM4	¹⁄₄ in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	No
SGLFPF6502VMM4	¹⁄₄ in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	Yes
SGLFPF6501VMM8	¹⁄₂ in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	No
SGLFPF6502VMM8	¹⁄₂ in. Gasket seal, (VCR or compatible) male / male	127 / 5.0	Yes
SGLFPF6501VMM12	³⁄₄ in. Gasket seal, (VCR or compatible) male / male	140 / 5.5	No
GLFPF6501VMF4	¹⁄₄ in. Gasket seal, (VCR or compatible) male / female	141 / 5.6	No
SGLFPF6501SM4	¹⁄₄ in. Compression seal, (Swagelok⁴ or compatible) male / male	113 / 4.4	No
GLFPF6501SM4	¹⁄₄ in. Compression seal, (Swagelok or compatible) male / male	141 / 5.6	No
SGLFPF6501SM6	³⁄₈ in. Compression seal, (Swagelok or ccompatible) male / male	118 / 4.6	No
GLFPF6501SM6	³⁄₈ in. Compression seal, (Swagelok or compatible) male / male	148 / 5.8	No
SGLFPF6501SM8	¹⁄₂ in. Compression seal, (Swagelok or compatible) male / male	119 / 4.7	No

³ To order in box quantities of 24, please add “SB24” at the end of the part number. Example: SGLFPF6502VMM4SB24
⁴ Swagelok is a trademark of Swagelok Co.

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