The Membralox® ceramic filter assemblies are designed for ultra-high purity gas filtration applications, providing removal of particles ≥ 3 nanometer.
Products in this datasheet may be covered by one or more patents, including EP 442,410; US 5,143,614.
1Particle rating based on laboratory testing with NaCl aerosol.2VCR is a trademark of Swagelok Co..
* For CE marked parts, add a "-CE" suffix to the part number (example, MLOX 03-30-1/4BW-CE). Other configurations are available upon request. Please consult Pall Microelectronics.
Unit conversion: 1 bar = 100 kilopascals
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Product Type: Filter Capsules
Segment: Photovoltaics, Semiconductor