Mini Ultramet-L® 1100 Series Filter Assembly

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Process Gas Filtration
Mini Ultramet-L® 1100 Series Filter Assembly

The Mini Ultramet-L^®1100 Series filter assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 1.5 nm (0.0015 μm) filtration of semiconductor grade gases, and is ideally suited for point-of-use applications. The 1100 Series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel.

One circumferential weld in entire product
State-of-the-art 316L stainless steel or nickel medium
Excellent particle removal efficiency vs. pressure drop
Accommodates extremely high flow rates for the assembly size

Excellent gas displacement and desorption characteristics
High temperature and pressure capabilities
Compact size
100% helium leak tested
Cleanroom manufactured and packaged

Specifications

Materials

Electropolished 316L stainless steel housing
Housing material meets or exceeds VIM/VAR specifications
EU Pressure Equipment Directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
≤ 0.13 μm / 5 μin R_a internal surface finish
Cr:Fe (1:1) chromium-enriched internal housing surface chemistry
316L stainless steel or nickel filter medium

Removal Rating

≥ 1.5 nm

Preconditioned Options 1102 Series

< 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD.)
< 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD.)
< 10 ppb O₂ contribution (Qualified per SEMASPEC test method #90120398B-STD.)
< No particle contribution above background ≤ 1 particle / m³ or ft³

Connections

¹⁄₄ in. gasket seal (VCR1 or compatible)
¹⁄₄ in. butt weld (0.89 mm / 0.035 in. wall)

Operating Conditions

Maximum operating pressure:
- 20.7 MPa @ 38 °C / 3,000 psig @ 100 °F
- 11.6 MPa @ 450 °C / 1,685 psig @ 840 °F
Maximum allowable differential pressure:

316L stainless steel filter:
- 0.86 MPa @ 38 °C / 125 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F
Nickel filter:
- 0.69 MPa @ 38 °C / 100 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F

Particle Removal Characteristics

10⁹ particle reduction up to 15 slpm

Leak Rating

100% helium leak tested to 10^-9 atm•cm³/s
Design validated to 10^-11 atm•cm³/s

¹VCR is a trademark of Swagelok Company.

Performance

316L Stainless Steel Filter Assembly

Pressure Drop vs. Gas Flow Rate

Nickel Filter Assembly

Additional Information

Dimensions

Ordering Information

Part Number	Description	Fitting Type	Length (L)	Preconditioned
GLFF1100VMM4	All 316L stainless steel	¹⁄₄ in. gasket seal (VCR or compatible) male / male	84 / 3.31	No
GLFF1100VFM4	All 316L stainless steel	¹⁄₄ in. gasket seal (VCR or compatible) female inlet / male outlet	88 / 3.47	No
GLFF1100BW4	All 316L stainless steel	¹⁄₄ in. butt weld, 0.89 mm / 0.035 in wall	42.5 / 1.75	No
GLFF1102VMM4	All 316L stainless steel	¹⁄₄ in. gasket seal (VCR or compatible) male / male	84 / 3.31	Yes
GLFN1100VMM4	Nickel media, 316L stainless steel housing	¹⁄₄ in. gasket seal (VCR or compatible) male / male	84 / 3.31	No
GLFN1100VMF4	Nickel media, 316L stainless steel housing	¹⁄₄ in. gasket seal (VCR or compatible) male inlet / female outlet	71.1 / 2.80	No
GLFN1100BW4	Nickel media, 316L stainless steel housing	¹⁄₄ in. butt weld, 0.89 mm / 0.035 in. wall	42.5 / 1.75	No
GLFN1102VMM4	Nickel media, 316L stainless steel housing	¹⁄₄ in. gasket seal (VCR or compatible) male / male	84 / 3.31	Yes

Unit conversion: 100 kilopascals = 1 bar

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