Small Flow Emflon® Filter (Gas Filtration)

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Process Gas Filtration
Small Flow Emflon® Filter (Gas Filtration)

BROCHURE

COST

Emflon^® filter elements are designed for ≥ 3 nanometer (0.003 μm) filtration of inert gas applications used in the production of semiconductor devices.

Wide variety of applications
High particle removal efficiency
Flow rates up to 50 scfm
High flow rates vs. differential pressure
Optimized cartridge design
Manufactured in a cleanroom environment
100% integrity tested

Specifications

Materials

Medium: PTFE
Core, cage, and end caps: Polypropylene
Support and drainage: Polypropylene
O-rings: Viton¹, Viton-A

Removal Rating

≥ 0.003 μm

Configurations

Nominal length:
- 1 in./25 mm
- 1.75 in./44 mm
- 2.5 in./64 mm
- 5 in./127 mm
Diameter: 2.18 in./55 mm
O-ring size/end caps:
- 115 internal/flat end (9106/9112)
- 116 internal/flat end (2230/4463)
- 118 external/flat end (4440)
- 209 internal/flat end (9130/9163)

Operating Conditions

Maximum Temperature: 194 °F/90 °C
Maximum Forward Differential Pressure:
- 80 psid @ 120 °F/5.5 bar @ 50 °C
- 50 psid @ 194 °F/3.5 bar @ 90 °C

¹ Viton is a trademark of DuPont Dow Elastomers

Performance

Pressure Drop vs. Gas Flow Rate

Cartridge Style Junior 9106/9112

Cartridge Style Junior 4440

Cartridge Style Junior 2230/9130

Cartridge Style Junior 4463/9163

Ordering Information

Part Number	Removal Rating (μm)	Nominal Length (in. / mm)	O-Ring Size/Material
MCY9106FREH	0.003	1 / 25	115 / Viton (Internal)
MCY9112FREH	0.003	1.75 / 44	115 / Viton (Internal)
MCY9130FREH	0.003	2.5 / 64	209 / Viton (Internal)
MCY9163FREH	0.003	5 / 127	209 / Viton (Internal)
MDY2230FREHF	0.003	2.5 / 64	116 / Viton A (Internal)
MCY4463FREHF	0.003	5 / 127	116 / Viton A (Internal)
MCY4440FREHF	0.003	5 / 127	118 / Viton A (External)

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