Small Flow Emflon® Filter (Gas Filtration)

Home
Process Gas Filtration
Small Flow Emflon® Filter (Gas Filtration)

BROCHURE

COST

The Ultramet-L^® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 1.5 nanometer filtration of semiconductor process gases.

All 316L stainless steel construction
State-of-the-art 316L stainless steel media
Excellent particle removal efficiency vs. pressure drop
Accommodates extremely high flow rates for the assembly size
Excellent gas displacement and desorption characteristics
High temperature and pressure capabilities
Compact size for ease of installation
Wide variety of fitting options available
100% helium leak tested
Cleanroom manufactured and packaged
VAR PLUS housing material meets or exceeds VIM VAR specifications

Specifications

Filter Medium	316L stainless steel
Internal Surface Finish	≤ 7 μin / 0.18 μm R_a
Housing	Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications
Removal Rating	≥ 1.5 nm
Particle Removal Characteristics	10⁹ particle reduction up to 6 slpm / 0.2 scfm
Particle Removal Characteristics	10⁴ particle reduction up to 75 slpm / 2.6 scfm
Connections	1⁄4", 1⁄2" Gasket Seal, Male / Male (VCR1 or compatible)
	1⁄4" Compression Seal, Male / Male (Swagelok¹ or compatible)
	1⁄4" Butt Weld (0.035" / 0.89 mm wall)
Leak Rating	100% helium leak tested to 10^-9 atm•cc/s
Leak Rating	Design validated to 10^-11 atm•cm³/s
Maximum Operating Pressure	3000 psig @ 100 °F / 207 bar @ 38 °C 1685 psig @ 840 °F / 1 16 bar @ 450 °C
Maximum Allowable Differential Pressure	125 psid @ 100 °F / 8.6 bar @ 38 °C 60 psid @ 840 °F / 4.1 bar @ 450 °C
EU pressure equipment directive	Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

¹ VCR and Swagelok are trademarks of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Additional Information

Dimensions

Ordering Information

Part Number	Description	Length (L) (in. / mm)
GLFF4000VM4	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male/Male	3.31 / 84 (L₁)
GLFF4000SM4	¹⁄₄ in. Compression Seal (Swagelok or Compatible) Male/Male	2.88 / 73 (L₁)
GLFF4000BW4	¹⁄₄ in. Butt Weld, 0.035 in. / 0.89 mm wall	1.75 / 45 (L₂)
GLFF4000VMM8	¹⁄₂ in. Gasket Seal (VCR or Compatible) Male/Male	3.35 / 85 (L₁)

Unit conversion: 1 bar = 100 kilopascals

Get In Touch

Please fill out the form below with your details and message, and we'll get back to you as soon as possible.

Name*

Phone

Email*

Company*

Your Question*

I would like to receive more information about ABLROOTS INDUSTRIES products and services, and related product and services from ABLROOTS INDUSTRIES related companies via email or phone.

More Products

ChamberKleen™ Diffusers

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

Emflon® PF Filter (Gas Filtration)

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote

Gasket-Sert™ PSP Filter

Product Type: Filter Capsules

Segment: Photovoltaics, Semiconductor

View Details Add to Quote