Ultramet-L® 4281, 4581 Series Assembly

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Process Gas Filtration
Ultramet-L® 4281, 4581 Series Assembly

The Ultramet-L^® 4281/4581 Series Filter Assemblies are available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. They are designed for ≥ 1.5 nanometer (0.001.5 μm) filtration of semiconductor grade gases. The 4281/4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.

State-of-the-art 316L stainless steel or nickel media
Excellent particle removal efficiency vs. pressure drop
Accommodates extremely high flow rates for the assembly size

Excellent gas displacement and desorption characteristics
High temperature and pressure capabilities
Compact size for ease of installation
Wide variety of fitting options available
100% helium leak tested
Cleanroom manufactured and packaged
Housing material meets or exceeds VIM VAR specifications.

Specifications

Filter Medium	316L stainless steel or nickel
Internal Surface Finish	10 μin / 0.25 μm R_a
Housing	Electropolished 316L stainless steel Housing material meets or exceeds typical VIM VAR specifications
Removal Rating	≥ 1.5 nm
Particle Removal Characteristics	4281 series: 10⁹ particle reduction up to 6 slpm / 0.2 scfm 10⁴ particle reduction up to 75 slpm / 2.6 scfm
Particle Removal Characteristics	4581 series: 10⁹ particle reduction up to 50 slpm / 1.76 scfm
Connections	1⁄4" Gasket Seal, male (VCR¹ or compatible)
Connections	Other fitting configurations available, please contact Pall
Leak Rating	100% helium leak tested to 10^-9 atm•cm³/sec
Leak Rating	Design validated to 10^-11 atm•cm³/sec
Maximum Operating Pressure	3,000 psig @ 100 °F / 207 bar @ 38 °C; 1,685 psig @ 840 °F / 116 bar @ 450 °C
Maximum Allowable Differential Pressure	125 psid @ 100 °F / 8.6 bar @ 38 °C; 60 psid @ 840 °F / 4.1 bar @ 450 °C
EU pressure equipment directive	Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

¹VCR is a trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

GLFF4281VMM4

GLFF4581VMM4

GLFN4581VMM4

Additional Information

Dimensions

Ordering Information

Part Number	Description	Fitting Type
GLFF4281VMM4	All Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male / Male
GLFF4581VMM4	All Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male / Male
GLFN4581VMM4	Nickel Media, 316L Stainless Steel Housing	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male / Male

Unit conversion: 1 kilogram per square centimeter = 98.067 kilopascals

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