Ultramet-L® 5500 Series Filter Assembly

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Process Gas Filtration
Ultramet-L® 5500 Series Filter Assembly

BROCHURE

COST

The Ultramet-L^® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 1.5 nanometer (0.0015 μm) filtration of semiconductor process gases.

All 316L stainless steel construction
State-of-the-art 316L stainless steel media
Excellent particle removal efficiency versus pressure drop
Excellent gas displacement and desorption characteristics
High temperature capabilities
Compact size
100% helium leak tested
Clean room manufactured and packaged
Available preconditioned
CE marked in accordance with PED 97/23/EC

Specifications

Filter Medium	316L stainless steel
Internal Surface Finish	5500: ≤ 10 μin / 0.25 μm R_a 5502: ≤ 0.7 μm R_max
Housing	Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications
Removal Rating	≥ 1.5 nm
Particle Removal Characteristics	10⁹ particle reduction up to 150 slpm
Preconditioned Option¹ (5502 Series)	< 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
	< 10 ppb thc contribution (Qualified per SEMASPEC test method #90120396B-STD)
	< 10 ppb 02 contribution (Qualified per SEMASPEC test method #90120398B-STD)
	No particle contribution above background ≤ 1 particle / (ft³ or m³)
Connections	1⁄4" Gasket Seal Male / Male (VCR² or compatible)
	1⁄4" Butt Weld Male / Male (0.035" / 0.89 mm wall)
	1⁄2" Gasket Seal Male / Male (VCR or compatible)
	1⁄2" Butt Weld (0.049" / 1.24 mm wall)
Maximum Operating Pressure	750 psig @ 100 °F / 51.7 bar @ 38 °C 550 psig @ 800 °F / 38 bar @ 426 °C for inert gases only
Maximum Allowable Differential Pressure	75 psid @ 68 °F / 5.2 bar @ 20 °C
Leak Rating	100% helium leak tested to 10^-9 atm•cm³/s
Leak Rating	Design validated to 10^-11 atm•cm³/s
EU pressure equipment directive	Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

¹ The 5500 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
² VCR is a registered trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Additional Information

Dimensions

Ordering Information

Part Number	Description	Fitting Type	Length (L) (in. / mm)	Preconditioned
GLFF5500VMM4	All 316L Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male/Male	5.00 / 127	No
GLFF5500VMM8	All 316L Stainless Steel	¹⁄₂ in. Gasket Seal (VCR or Compatible) Male/Male	5.00 / 127	No
GLFF5500BW4	All 316L Stainless Steel	¹⁄₄ in. Butt Weld, 0.035 in. / 0.89 mm wall	2.50 / 64	No
GLFF5500BW8	All 316L Stainless Steel	¹⁄₂ in. Butt Weld, 0.049 in. / 1.24 mm wall	2.50 / 64	No
GLFF5502VMM4	All 316L Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male/Male	5.00 / 127	Yes
GLFF5502VMM8	All 316L Stainless Steel	¹⁄₂ in. Gasket Seal (VCR or Compatible) Male/Male	5.00 / 127	Yes
GLFF5502BW4	All 316L Stainless Steel	¹⁄₄ in. Butt Weld, 0.035 in. / 0.89 mm wall	2.50 / 64	Yes
GLFF5502BW8	All 316L Stainless Steel	¹⁄₂ in. Butt Weld, 0.049 in. / 1.24 mm wall	2.50 / 64	Yes
SGLFF5500VMM4	All 316L Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male/Male	3.31 / 84	No
SGLFF5500VMM8	All 316L Stainless Steel	¹⁄₂ in. Gasket Seal (VCR or Compatible) Male/Male	3.31 / 84	No
SGLFF5502VMM4	All 316L Stainless Steel	¹⁄₄ in. Gasket Seal (VCR or Compatible) Male/Male	3.31 / 84	Yes
SGLFF5502VMM8	All 316L Stainless Steel	¹⁄₂ in. Gasket Seal (VCR or Compatible) Male/Male	3.31 / 84	Yes

Unit conversion: 1 bar = 100 kilopascals

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