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Varafine™ VFSH Series Filter Cartridges

Overview
Specifications
Applications
Performance
Additional Information
Ordering Information
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Designed for Ultrapure Filtration of Inert Gases

  • Gas retention ratings of 3 nm provided by positive mechanical retention
  • Patented, highly asymmetric, hydrophobic polysulfone membrane provides high flow rates and low pressure drops
  • Non-shedding hydrophobic media rinsed at factory with ultrapure water
  • Available in 10.2 cm / 4 in., 25.4 cm / 10 in., 50.8 cm / 20 in., 76.2 cm / 30 in., or 102 cm / 40 in. cartridge lengths (nominal)
  • Effective alternative to expensive PTFE filters for Inert gas applications

Specifications

Materials of Construction

Filter media: Highly asymmetric polysulfone membrane
Hardware: Polypropylene
Support material: Polypropylene
Sealing: Thermal bond
O-rings (SOE): Silicone (standard)
Gaskets (DOE): Nitrile (standard)

Dimensions (nominal)

Outside diameter: 6.6 cm / 2.6 in.
Lengths 10.2 cm / 4 in., 25.4 cm / 10 in.,
50.8 cm / 20 in., 76.2 cm / 30 in.,
102 cm / 40 in.

Applications

Inert gases

Point-of-use filter for air, nitrogen, and other inert gases.

Bulk atmospheric gases

Bulk gas filter prior to distribution of inert gases to appropriate areas of the fab site.

Semiconductor process equipment

Integral filtration component in semiconductor processing equipment.

Performance

Gas flow rate

  • 1700 slpm (1.7 bard inlet, 0.07 bard differential)
  • 60 scfm (25 psig inlet, 0.9 psid)

Maximum forward differential pressure

  • 5.5 bard @ 20 °C / 80 psid @ 68 °F
  • 1.4 bard @ 95 °C / 20 psid @ 203 °F

Gas retention rating

  • 3 nm

Cleanliness

  • Cartridges rinsed at factory with 18 megohm-cm water.

Additional Information

Pressure Drop vs. Air Flow Rate

Unit conversion: 1 bar = 100 kPa

1 50 psig (3.4 bar) inlet pressure

Ordering Information

VFSH003 [1][2][3] (e.g. VFSH00310M3S)

Table 1 - Cartridge Lengths

Code Cartridge Lengths (nominal)
04 10.2 cm / 4 in. (M3 only)
10 25.4 cm / 10 in.
20 50.8 cm / 20 in.
30 76.2 cm / 30 in.
40 102 cm / 40 in.

Table 2 - End Configurations

Code End Configurations
M2 SOE flat closed end, fits housings with 020 O-ring post
M3 SOE flat closed end, external 222 O-rings
M5 DOE, internal O-rings
M6 SOE flat closed end, external 226 O-rings
M7 SOE fin end, external 226 O-rings
M8 SOE fin end, external 222 O-rings
DOE DOE with elastomer gasket seal and end caps

Table 3 - Gasket / O-ring Materials

Code Gasket / O-ring Materials
S Silicone
E EPDM
V Fluoroelastomer (standard O-rings)
N Nitrile
T FEP encapsulated silicone (O-rings)
F FEP encapsulated fluoroelastomer

Representative example part numbers

VFSH00304M3E
VFSH00310DOEE300
VFSH00310M3E300
VFSH00310M3S300
VFSH00310M7E300
VFSH00310M7V300
VFSH00320M3S300
VFSH00320M7F300
VFSH00320M7V300
VFSH00320M8S300
VFSH00330M3E300
VFSH00330M8E300
VFSH00330M8S300		 VFSH01010DOEE190
VFSH01010DOEE790
VFSH01010M3E190
VFSH01010M3E790
VFSH01010M3S790
VFSH01010M7S790
VFSH01020DOES790
VFSH01020M3E190
VFSH010975M3E190		 VFSH02004M3E300
VFSH02004M3S300
VFSH02010DOEE300
VFSH02010M3E300
VFSH02010M3S300
VFSH02010M3S300
VFSH02010M3V300
VFSH02010M7E300
VFSH02010M7S300
VFSH02020M3E
VFSH02020M3S300
VFSH02020M3V300
VFSH02020M7E300
VFSH02020M7V300
VFSH02020M8E300
VFSH02020M8S300
VFSH02030M7E300
VFSH020-30M8E 300
VFSH02030M8E300
VFSH02040M3E300
VFSH020975M3E300

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