Gaskleen® ST Purifier

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Process Gas Purification
Gaskleen® SP Gas Purifier

The Pall Gaskleen® SP purifier assembly protects zirconium oxide (ZrO₂) sensors used in oxygen analyzers. The purifier removes harmful contaminants, which cause drifts in the oxygen analyzer readings and degradation of the electrode performance.

Use of this purifier does not affect oxygen levels in the process stream.

State-of-the-art 316L stainless steel filter media with proprietary metal catalyst
Compact size
100% helium leak tested
Cleanroom manufactured and packaged
Ideally suited for use in RTP, LPCVD and PECVD exhaust gas applications

Product Benefits

Extends the time between sensor calibrations, which maximizes tool uptime and ensures accuracy of the instrument's readings.
In-line configuration allows for easy installation upstream of the oxygen analyzer.
The integral filter provides particle removal down to 3 nm.
Flow rates up to 1 slpm.

Products in this datasheet may be covered by one or more patents, including US 7,438,864

Specifications

Materials

Electropolished 316L SS housing
316L stainless steel filter medium with proprietary metal catalyst
10 μin / 0.25 μm Ra internal surface finish

Removal Rating

≥ 3 nm

Particle Removal Characteristics

10⁹ reduction up to 1 slpm

Connections

¹⁄₄ in. Male gasket seal

Operating Conditions

Maximum operating pressure: 1.48 MPa @ 400 °C / 200 psig @ 752 °F
Maximum differential pressure: 0.69 MPa @ 38 °C / 125 psid @ 100 °F

Leak Testing

100% helium leak tested to 10^-9 atm-cm³/s
Design validated to 10^-11 atm-cm³/s

EU Pressure Equipment Directive:

Assembly is designed and manufactured in accordance with sound engineering practices per the European Union's Pressure Equipment Directive 97/23/EC.

Performance

Pressure Drop vs. Gas Flow Rate

Dimensions

Ordering Information

Part Number	Description	Length (L) (mm / in.)
4HD4886-3181	¹⁄₄ in. male / male gasket seal	88.4 / 3.50

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