Gaskleen® ST Purifier

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Process Gas Purification
Maxi Gaskleen® Gas Purifier

The Maxi Gaskleen gas purifier is a unique combination of Pall's leading edge AresKleen™ purification material together with our Ultramet-L® stainless steel filter medium, creating the industry's most advanced true point-of-use purifier

The Maxi GasKleen Purifier assembly is designed to remove contamination from most process gases. Sub ppb level purification is achieved at designed flow rates of up to 50 slpm while providing 3 nm filtration.

Controls and reduces impurities such as O₂, H₂O, CO₂, CO, NMHC, Ni(CO)₄ and FE(CO)₅
One-for-one dimensional replacement of conventional in-line particle filter assemblies
Assembly hardware is made of 316L stainless steel
High efficiency diffusion barrier ensures integrity of reactive material during installation
Superior pressure drop characteristics
>Wide variety of gases purified
100% helium leak and pressure tested
Not orientation sensitive
Does not generate hazardous waste when used in non-hazardous gas service
Will not release hydrocarbons
No detectable metal contribution above background in HCl gas with HCLP material
No detectable metal contribution above background in HBr gas with HBRP material

Specifications

Materials

Electropolished 316 L stainless steel components
≤ 0.25 μm / 10 μin R_a internal surface finish

Particle Removal Efficiency Rating

1x10⁹ retention of particles ≥ 3 nm up to 50 slpm

Connections

¹⁄₄ in. Gasket Seal, Male/Male (VCR¹ compatible)

Operating Conditions

Maximum operating pressure: 5.2 MPa / 750 psig
Maximum operating temperature:
- 100 °C / 212 °F (INP, SIP, FCP, SF6P)
- 40 °C / 104 °F (GEH4P, OXP, CLXP, HCLP, HBRP, CDAP)
EU Pressure Equipment Directive: Assemblies have been evaluated and are CE marked per the European Union's Pressure Equipment Directive 2014/68/EC.

Design Flow Rate

0-50 slpm @ 0.1 MPa / 15 psig inlet
Intermittent flow rates up to 100 slpm can be accommodated with reduced lifetime²

Packaging

Double bagged Outer bag: aluminized mylar³ Inner bag: polyethylene
End fittings capped with metal seals
Product packaged in an argon environment

Dimensions

Length: 208 mm / 8.2 in.
Diameter: 63.5 mm / 2.5 in.

¹ VCR is a trademark of Swagelok Co.
² Contact the Pall Microelectronics Group for further information.
³ Mylar is a registered trademark of Dupont Teijin Films.

Technical Information

Impurity Removal as Tested in Specific Gases

Specific Gas	Impurity Removal Efficiency
Inert gases: Nitrogen, argon, helium, xenon, krypton, neon	< 1 ppb H₂O, CO₂, O₂, and CO as tested in argon and nitrogen using APIMS analyzer
Flammable gases: Silane, hydrogen, methane, ethane, cyclopropane, propane, dimethyl ether	< 1 ppb H₂O, CO₂, O₂, and CO as tested in argon, nitrogen ydrogen using APIMS analyzer < 1 ppb H₂O as tested in carbon monoxide using trace moisture analyzer H₂O and siloxanes removed to trace levels as tested in silane using APIMS
Carbon monoxide	< 1 ppb Ni(CO)₄, and < 1 ppb Fe(CO)₅ as tested in carbon monoxide using GC-ECD analyzer
Fluoromethane, difluoromethane, trifluoromethane, tetrafluoroethane, pentafluoroethane, heptafluoropropane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane	< 1 ppb H₂O, CO₂, O₂, and CO as tested in argon and nitrogen using APIMS analyzer < 1 ppb O₂ as tested in trifluoromethane using trace oxygen analyzer < 10 ppb H₂O as tested in trifluoromethane using trace moisture analyzer and FTIR
Germane	< 1 ppb H₂O, CO₂, O₂, and CO as tested in argon and nitrogen using APIMS analyzer
Sulfur hexafluoride	< 1 ppb H₂O, CO₂, and O₂ as tested in argon using APIMS
Oxygenated gases: Carbon dioxide, oxygen, nitrous oxide, clean dry air	< 10 ppb H₂O < 1 ppb H₂O, and CO₂, as tested in argon using APIMS analyzer
Chlorinated gases: Boron trichloride, chlorine, trichlorosilane, dichlorosilane	< 100 ppb H₂O < 1 ppb H₂O, and CO₂, as tested in argon using APIMS analyzer
Hydrogen chloride	< 15 ppb H₂O as tested in hydrogen chloride using CRDS < 1 ppb H₂O as tested in argon using APIMS analyzer
Hydrogen bromide	< 50 ppb H₂O as tested in hydrogen bromide using CRDS < 1 ppb H₂O as tested in argon using APIMS analyzer
Photolithography clean dry air	< 1 ppb H₂O as tested in argon using APIMS analyzer < 300 ppt C₄H₈ as tested in argon using APIMS Analyzer < 10 ppt SO₂ as tested in nitrogen using ion chromatograph < 15 ppt NH₃ as tested in nitrogen using ion chromatograph < 1 ppt HMDSO as tested in argon using APIMS analyzer and baseline subtraction

Unit conversion: 100 kilopascals = 1 bar

Performance

Pressure Drop vs. Gas Flow Rate

Nominal Dimensions

Lifetime Calculations

Ordering Information

Part Number	Specific Gas	Effluent Purity Specifications
GLP8INPVMM4	Inert gases: Nitrogen, argon, helium, xenon, krypton, neon	< 1 ppb H₂O, CO₂, O₂, CO
GLP8SIPVMM4	Flammable gases: Silane, hydrogen, methane, ethane, cyclopropane, propane, dimethyl ether	1 ppb H₂O, CO₂, O₂, CO
	Carbon monoxide	< 1 ppb H₂O, O₂, CO₂, Ni(CO)₄, FE(CO)₅
GLP8FCPVMM4	Fluoromethane, difluoromethane, trifluoromethane, pentafluoroethane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane	< 1 ppb H₂O, CO₂, O₂
GLP8GEH4PVMM4	Germane	< 1 ppb H₂O, CO₂, O₂, CO
GLP8SF6PVMM4	Sulfur hexafluoride	< 1 ppb H₂O, CO₂, O₂, CO
GLP8OXPVMM4	Oxygenated gases: Carbon dioxide, oxygen, nitrous oxide	< 10 ppb H₂O
GLP8CLXPVMM4	Chlorinated gases: Boron trichloride, chlorine, trichlorosilane, dichlorosilane	< 100 ppb H₂O
GLP8HCLPVMM4	Hydrogen chloride	< 15 ppb H₂O
GLP8HBRPVMM4	Hydrogen bromide	< 50 ppb H₂O
GLP8CDAPVMM4	Photolithography clean dry air	< 1 ppb H2O, < 300 ppt organics (as C4), < 10 ppt acid gases (as SO2), < 15 ppt basic gases (as NH3), < 1 ppt refractory compounds (as HMDSO)

*Unit conversion: 100 kilopascals = 1 bar

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