| Specific Gas |
Impurity Removal Efficiency |
| Inert gases: nitrogen, argon, helium, xenon, krypton, neon |
<1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer |
| Flammable gases: silane, hydrogen, methane, ethane, cyclopropane, propane, dimethyl ether |
<1 ppb H2O, CO2, O2, and CO, as tested in argon, nitrogen
and hydrogen using APIMS analyzer
<1 ppb H2O, as tested in carbon monoxide using trace moisture analyzer
H2O and siloxanes removed to trace levels, as tested in silane using APIMS |
| Carbon monoxide |
<1 ppb Ni(CO)4, and < 1 ppb Fe(CO)5, as tested in carbon monoxide using GC-ECD analyzer |
| Fluorocarbons: fluoromethane, difluoromethane, trifluoromethane, tetrafluoroethane, pentafluoroethane,
heptafluoropropane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane |
<1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer
<1 ppb O2, as tested in trifluoromethane using trace oxygen analyzer
<10 ppb H2O, as tested in trifluoromethane using trace moisture analyzer and FTIR |
| Germane |
<1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer |
| Sulfur hexafluoride |
<1 ppb H2O, CO2, and O2, as tested in argon using APIMS |
| Oxygenated gases: carbon dioxide, oxygen, nitrous oxide, clean dry air |
<10 ppb H2O
<1 ppb H2O, and CO2, as tested in argon using APIMS analyzer |
| Chlorinated gases: boron trichloride, chlorine, trichlorosilane, dichlorosilane |
<100 ppb H2O
<1 ppb H2O, and CO2, as tested in argon using APIMS analyzer |
| Halogenated gases: hydrogen chloride, hydrogen bromide |
< 15 ppb H2O as tested in hydrogen chloride using CRDS
< 50 ppb H2O as tested in hydrogen bromide using CRDS
< 1 ppb H2O as tested in argon using APIMS analyzer |
| Photolithography clean dry air |
< 1 ppb H2O as tested in argon using APIMS analyzer
< 300 ppt C4H8 as tested in argon using APIMS Analyzer
< 10 ppt SO2 as tested in nitrogen using ion
chromatograph
< 15 ppt NH3 as tested in nitrogen using ion chromatograph
< 1 ppt HMDSO as tested in argon using APIMS analyzer and baseline subtraction |