Ultra Clean Water Filtration Skid

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Ultra Clean Water Filtration Skid

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The new Ultra Clean Water Filtration Skid features the latest technology for ultrapure water cleanliness, using a newly developed ultrafiltration (UF) membrane that is dual-rated at 2 nm and 4 kD.

UF is the state of the art final filtration step prior to the final utilization of ultrapure water in semiconductor manufacturing. It is used to remove traces of

Nanoparticles
Macromolecules
Colloidal silicates

out of ultrapure water.

Hollow fiber membranes bundled in UF module housings divide the incoming ultrapure water into ultra clean permeate and contamination containing reject. Controlled back-diffusion of accumulated particles prevents contamination of the membrane. The reject—typically 5% of the permeate flow—discharges the collected contaminations from the UF modules. The reject flow will be cleaned up in a polisher.

The Ultra Clean Water Filtration Skid is used for today’s most demanding ultra-high purity water systems in sub fab level or at the point of use.

A Key Tool for UPW Supply in the Semiconductor Industry

Up to four UF modules are combined in a closed micro environment. They facilitate up to 50 m³/h permeate flow. Skids can be combined to provide higher flow capacity.

A purge flow of filtered clean dry air (CDA) prior to and during maintenance creates a clean environment surrounding the UF modules and reduces contamination of interfaces and piping /module connections. Water reject is treated by a polishing unit that increases recovery rate up to 100%.

Designed to Meet the Highest Demands

Superior retention of nanoparticles, macro-molecular contamination and colloidal silicates
Up to 100 % recovery rate
Uses high performance Pall Microza UF modules
Preventive maintenance based on in situ module integrity tests using Palltronic® analyzers
Compact “all in one” cabinet provides smallest footprint
PVDF HP piping for highest purity
Air purging facilitates module exchange and maintenance operations under micro environment
Recording, visualization and digital monitoring of pressure signals by an electronic data manager enables easy system integration
“Plug & play” approach minimizes time and cost for installation and commissioning
Seismic brackets

Specifications

Dimensions (Length x Width x Height)

Base Unit: 1,250 x 1,100 x 2,174 mm
Base Unit + Valves: 1,618 x 1,100 x 2,174 mm

Space Requirements (Length x Width x Height, approximate)

Base Unit: 2,000 x 2,300 x 2,500 mm
Base Unit + Valves: 2,370 x 2,300 x 2,500 mm

Net Weight

380 kg (without disposable filters and UF Modules, approximate)

Main Connections

Feed and Permeate: DN100 or 4"
Reject: DN25 or 1"

Options

Master valves DN100 or 4" for feed and permeate. Further options on demand

Additional Information

Design Parameters

	Unit	Value
Maximum operating pressure	barg	9
Maximum operating temperature*	°C	up to 80
Design Permeate flow rate	m3/h	up to 50
Design airflow	Nm3/h	up to 58
Material for water piping system		PVDF HP
Number of UF modules		1 to 4
Suitable UF module series	Pall Microza OAT-6036 or OLT-6036

* 90 °C for short term sanitization

Utilities

Power supply for data logger:
110-230 V AC, 1 phase 50 or 60 Hz.
Air supply:
0.6 – 0.8 MPa ( 87 – 116 psig); < 60 Nm³/h (temporarily); dry, filtered, oil-free, ambient temperature
24 V interface

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