| Specific Gas |
Impurity Removal Efficiency |
| Inert Gases: Nitrogen, Argon, Helium, Xenon, Krypton, Neon |
< 1 ppb H2O, CO2, O2, and CO as tested in argon and nitrogen using APIMS analyzer |
| Flammable Gases: Silane, Hydrogen, Methane, Ethane, Cyclopropane, Propane, Dimethyl Ether, Ethylene, Propylene, Carbonyl Sulfide |
< 1 ppb H2O, CO2, O2, and CO as tested in argon, nitrogen, and hydrogen using APIMS analyzer
< 1 ppb H2O as tested in carbon monoxide using trace moisture analyzer
H2O and
siloxanes removed to trace levels as tested in silane using APIMS |
| Carbon Monoxide |
< 10 ppb Ni(CO)4 and < 1 ppb Fe(CO)5 as tested in carbon monoxide using GC-ECD analyzer |
| Fluoromethane, Difluoromethane, Trifluoromethane, Tetrafluoroethane, Pentafluoroethane, Heptafluoropropane, Carbon Tetrafluoride, Perfluoropropane, Perfluorocyclobutane, Hexafluoroethane |
< 1 ppb H2O, CO2, and CO as tested in argon and nitrogen using APIMS analyzer
< 1
ppb O2 as tested in trifluoromethane using trace oxygen analyzer
< 10 ppb H2O as tested in trifluomethane using trace moisture analyzer and FTIR |
| Germane |
< 1 ppb H2O, CO2, and O2 as tested in argon using APIMS |
| Sulfur Hexafluoride |
< 1 ppb H2O, CO2, O2, and CO as tested in argon and nitrogen |
|
Oxygenated Gases: Carbon Dioxide, Oxygen, Nitrous Oxide |
< 1 ppb H2O and CO2 as tested in argon using APIMS analyzer |
| Chlorinated Gases: Boron Trichloride, Chlorine, Trichlorosilane, Dichlorosilane |
< 1 ppb H2O and CO2 as tested in argon using APIMS analyzer |
| Hydrogen Chloride |
< 15 ppb H2O as tested in hydrogen chloride using CRDS
< 1 ppb H2O as tested in argon using APIMS analyzer |
| Hydrogen Bromide |
< 50 ppb H2O as tested in hydrogen bromide using CRDS
< 1 ppb H2O as tested in argon using APIMS analyzer |
| Photolithography Clean Dry Air |
< 1 ppb H2O as tested in argon using APIMS analyzer
< 300 ppt C4H8 as tested in argon using APIMS analyzer
< 10 ppt SO2 as tested in nitrogen using ion chromatograph
< 15 ppt NH3 as tested in nitrogen using ion chromatograph
< 1 ppt HMDSO as tested in argon using APIMS analyzer and baseline subtraction |